Device for vapor phase crystal growth

Abstract

PURPOSE:To form a susceptor support attached to a revolving shaft in a vapor phase crystal growth device in such a way that said support is highly resistant to corrosion and contamination and withstands repetition of an ordinary temp. and a high temp. by forming said support of a ceramic sintered body consisting of SiC, AlN, etc. CONSTITUTION:A susceptor support 2 which is attached to a revolving shaft 3 of a vapor phase crystal growth device and supports a susceptor 1 is formed of a ceramic sintered body consisting of SiC, AlN and Si3N4 or consisting essentially thereof and added with a sintering auxiliary such as Y2O3 or CeO2, etc. or is formed of a composite ceramic sintered body of Si3N4 and Al2O3. The shaft 3 is preferably formed of Ti or Ti alloy. A susceptor support which can support securely and surely the susceptor 1 is thus obtd.

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Cited By (12)

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    EP-1120817-A2August 01, 2001Ngk Insulators, Ltd.Corrosion-resistant member
    EP-1120817-A3January 30, 2002Ngk Insulators, Ltd.Korrosion beständiger Substratshalter
    JP-2015512565-AApril 27, 2015ビーコ・インストゥルメンツ・インコーポレイテッドキー付きウエハキャリア
    JP-2016015492-AJanuary 28, 2016ビーコ・インストゥルメンツ・インコーポレイテッド, Veeco Instruments Incキー付きウエハキャリア
    JP-S63140085-AJune 11, 1988Kyocera CorpFilm forming device
    JP-S636833-AJanuary 12, 1988Toshiba Ceramics Co LtdVapor growth apparatus
    US-5306895-AApril 26, 1994Ngk Insulators, Ltd.Corrosion-resistant member for chemical apparatus using halogen series corrosive gas
    US-6645303-B2November 11, 2003Applied Materials, Inc.Heater/lift assembly for high temperature processing chamber
    US-6878211-B2April 12, 2005Ngk Insulators, Ltd.Supporting structure for a ceramic susceptor
    US-9816184-B2November 14, 2017Veeco Instruments Inc.Keyed wafer carrier
    US-D744967-SDecember 08, 2015Veeco Instruments Inc.Spindle key
    US-D748591-SFebruary 02, 2016Veeco Instruments Inc.Keyed spindle